Abstract: A high precision diamond cutting machine has been developed for fabrication of a large size asymmetric aspheric mirror for soft x-ray optics. It is based on the positioning function of a diamond tool in the cylindrical coordinate. Error motions of a slide table in Z-axis are adjusted by the radius R and the rotating angle B. A workpiece fixed on an air bearing table can go and return with such a high accuracy of 0.05 $mu@m in straightness covering 600 mm stroke. The tool position in radius direction is controlled better than 0.01 $mu@m by a dc servo motor and a piezo-actuator and that, in rotating direction, is controlled better than 10$+$MIN@7$/ radian using only a dc servo motor. So, any radius in a cross section of a large size mirror, which is perpendicular to the rotating axis, can be machined with these precisions. This new machining method has an advantage to decrease scattering light because the direction of cutting is the same as the incident direction of light. The machining design and the features of the system are briefly reported. !4
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机译：摘要：已经开发出了一种高精度的金刚石切割机，用于制造用于软X射线光学器件的大尺寸非对称非球面镜。它基于钻石工具在圆柱坐标系中的定位功能。滑动台在Z轴上的误差运动通过半径R和旋转角度B进行调整。固定在空气轴承台上的工件可以在600 mm的直线度下以0.05 $μ@ m的高精度进出中风。直流伺服电机和压电致动器将半径方向上的刀具位置控制为优于0.01 $ mu @ m，而仅使用直流电时，在旋转方向上的刀具位置控制为优于10 $ + $ MIN @ 7 $ /弧度伺服马达。因此，可以以这些精度加工大尺寸反射镜横截面中垂直于旋转轴的任何半径。这种新的加工方法具有减少散射光的优点，因为切割方向与光的入射方向相同。简要介绍了加工设计和系统功能。 ！4
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