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Development of new instrument detecting integrated intensity fluctuations for surface roughness measurements

机译:开发用于检测整体强度波动以测量表面粗糙度的新型仪器

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Abstract: A new method to measure the surface roughness under a fully developed speckle pattern illumination has been proposed. This technique is used on the basis that the roughness depends on the speckle size of doubly scattered light and the size can be determined from the spatial fluctuations of the integrated intensity over a finite area. Using the CCD camera as a photodetector, the proposed system can determine the roughness at on-line. !7
机译:摘要:提出了一种在充分发展的斑点图案照明下测量表面粗糙度的新方法。使用该技术的依据是,粗糙度取决于双散射光的斑点大小,并且可以根据有限区域上积分强度的空间波动来确定该大小。使用CCD摄像机作为光电探测器,该系统可以在线确定粗糙度。 !7

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