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Two-stage x-ray mirror system for microscopic x-ray photoelectron spectroscopy

机译:用于显微X射线光电子能谱的两级X射线镜系统

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Abstract: An x-ray mirror system based on the off-axis configuration of Wolter-type mirrors is built up for microscopic x-ray photoelectron spectroscopy ($mu@- XPS), and its focusing characteristics are evaluated using the MgK$alpha x rays (1253.6 eV). The focussed beam diameter is 15 - 20 $mu@m when the 6 mm diameter x-ray source is used. This indicates that the mirror system has achieved the high demagnification of 1/300 - 1/400 required for $mu@-XPS analysis in the micrometer range. The future performance of $mu@-XPS analysis using a rotating-anode x-ray source is outlined. !25
机译:摘要:建立了基于沃尔特型镜偏轴配置的X射线镜系统,用于显微X射线光电子能谱($ mu @ -XPS),并使用MgK $ alpha x对其聚焦特性进行了评估。射线(1253.6 eV)。当使用直径为6mm的X射线源时,聚焦光束的直径为15-20μm@ m。这表明反射镜系统已实现了微米级X-XPS分析所需的1/300-1/400的高倍率。概述了使用旋转阳极X射线源进行$ mu @ -XPS分析的未来性能。 !25

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