Abstract: A sample consisting of different metals in the same plane is fabricated, and its surface profile is measured by interferometry. In spite of the flat surface, a virtual step height (max. value $EQ 33 nm) is measured at the boundary of the two adjacent metals. The measured step height corresponds to the difference in the phase change of reflected light between the two metals. From the results, the effect of the phase change on surface profilometry is estimated. !9
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