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Measurement of 2D birefringence distribution

机译:二维双折射分布的测量

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摘要

Abstract: A new measuring method of 2-D birefringence distribution has been developed. It has not been an easy job to get a birefringence distribution in an optical element with conventional ellipsometry because of its lack of scanning means. Finding an analogy between the rotating analyzer method in ellipsometry and the phase-shifting method in recently developed digital interferometry, we have applied the phase-shifting algorithm to ellipsometry, and have developed a new method that makes the measurement of 2-D birefringence distribution easy and possible. The system contains few moving parts, assuring reliability, and measures a large area of a sample at one time, making the measuring time very short. !12
机译:摘要:提出了一种新的二维双折射分布测量方法。由于缺乏扫描装置,在具有常规椭圆偏振法的光学元件中获得双折射分布并不是一件容易的事。在椭偏仪的旋转分析仪方法与最近开发的数字干涉仪中的相移方法之间找到类比,我们将相移算法应用于椭圆仪,并开发了一种使二维双折射分布测量变得容易的新方法并且可能。该系统包含很少的活动部件,确保了可靠性,并且一次可以测量大面积的样品,因此测量时间非常短。 !12

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