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Micro-optical instrumentation for process spectroscopy

机译：用于过程光谱的微光学仪器

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摘要

Traditional laboratory ultraviolet/visibleear-infrared spectroscopy instruments are tabletop-sized pieces of equipment that exhibit very high performance, but are generally too large and costly to be widely distributed for process control applications or used as spectroscopic sensors. Utilizing a unique, and proven, micro-optical technology platform originally developed, qualified and deployed in the telecommunications industry, we have developed a new class of spectroscopic micro-instrumentation that has laboratory quality resolution and spectral range, with superior speed and robustness. The fundamentally lower cost and small form factor of the technology will enable widespread use in process monitoring and control. This disruption in the ground rules of spectroscopic analysis in these processes is enabled by the replacement of large optics and detector arrays with a high-finesse, high-speed micro electro mechanical system (MEMS) tunable filter and a single detector, that enable the manufacture of a high performance and extremely rugged spectrometer in the footprint of a credit card. Specific process monitoring and control applications discussed in the paper include pharmaceutical, gas sensing and chemical processing applications.
机译：传统的实验室紫外/可见/近红外光谱仪是台式设备，具有很高的性能，但通常又太大又昂贵，无法广泛地分配到过程控制应用中或用作光谱传感器。利用最初在电信行业开发，认证和部署的独特且经过验证的微光学技术平台，我们开发了一种新型的光谱微仪器，具有实验室质量分辨率和光谱范围，具有卓越的速度和鲁棒性。该技术的根本上较低的成本和较小的外形尺寸将使其能够广泛用于过程监视和控制中。这些过程中光谱分析基本规则的这种破坏是通过用高精密度，高速微机电系统（MEMS）可调滤波器和单个检测器代替大型光学器件和检测器阵列来实现的，从而实现了制造高性能，坚固耐用的光谱仪在信用卡上的占位空间。本文讨论的特定过程监视和控制应用包括制药，气体传感和化学处理应用。

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