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A three-dimensional waveguide structure as a support for genomic and proteomic microarrays

机译：三维波导结构作为基因组和蛋白质组微阵列的支持

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In this paper we present a three-dimensional waveguide structure with unique optical and fluidic properties and demonstrate its application as a substrate for DNA microarrays. The structure is fabricated by thermal oxidation of a macroporous silicon membrane with a periodic pattern of discrete pores running perpendicular through the substrate. Partial oxidation generates a SiO_2 membrane, but leaves a rectangular grid of silicon walls dividing the membrane into compartments. We show that the SiO_2 walls act as optical waveguides and characterize their optical properties; modes can be launched using Koehler illumination. The silicon walls optically isolate adjacent compartments and prevent light from spreading laterally in the membrane. In a DNA hybridization experiment, the detection of 100 attomol of a Cy-3 labeled DNA fragment (17 oligonucleotides) has been achieved with a signal to noise ratio of > 3:1. We believe that even lower detection limits can be achieved by further tuning the optical parameters of the three-dimensional waveguide structure.
机译：在本文中，我们介绍了具有独特的光学和流体特性的三维波导结构，并展示了其作为DNA微阵列基板的应用。该结构是通过大孔硅膜的热氧化制成的，该膜具有垂直穿过基板的离散孔的周期性图案。部分氧化会生成SiO_2膜，但会留下一个矩形的硅壁网格，将膜分成多个隔室。我们表明，SiO_2壁起着光波导的作用，并表征了它们的光学特性。模式可以使用Koehler照明启动。硅壁在光学上隔离相邻的隔室，并防止光线在膜中横向扩散。在DNA杂交实验中，以> 3：1的信噪比实现了对100 attomol Cy-3标记的DNA片段（17个寡核苷酸）的检测。我们相信，通过进一步调整三维波导结构的光学参数，甚至可以实现更低的检测限。

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