• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XIX >REAL-TIME ADAPTIVE OPTIMIZATION OF LASER INDUCED NANO RIPPLES BY LASER PULSE SHAPING
【24h】

REAL-TIME ADAPTIVE OPTIMIZATION OF LASER INDUCED NANO RIPPLES BY LASER PULSE SHAPING

机译：激光脉冲整形对激光诱导纳米波纹的实时自适应优化

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

We propose a control technique for laser induced sub- micron ripples on titanium and silicon using femtosecond laser pulse shaping. This is based on a real-time observation method of nano ripples by diffraction of UV laser beam and programmable pulse temporal design. The feedback diffraction signal provided information of ripples' period, area, direction, and arrangement uniformity. By using a genetic algorithm optimization, ripples formation was optimized for their period tuning ability and their uniformity. The diffraction signals were validated with scanning electron microscope (SEM) images. At the generation wavelength of 800 nm and depending on the pulse form, ripples on titanium show periods from 610 nm to 680 nm, and ripples on silicon has periods from 710 - 770 nm. Laser pulse energy affects optimization due to transient energy deposit on material with pulse form effects in the threshold fluence and ripple areas.
机译：我们提出了一种使用飞秒激光脉冲整形在钛和硅上产生激光诱导的亚微米级纹波的控制技术。这是基于通过紫外激光束衍射和可编程脉冲时间设计实时观察纳米波纹的方法。反馈衍射信号提供了纹波的周期，面积，方向和排列均匀性的信息。通过使用遗传算法优化，优化了纹波形成的周期调整能力和均匀性。用扫描电子显微镜（SEM）图像验证衍射信号。在800 nm的产生波长下，并且取决于脉冲形式，钛上的纹波的周期为610 nm至680 nm，而硅上的纹波的周期为710-770 nm。由于瞬态能量沉积在材料上，并且在阈值通量和纹波区域具有脉冲形式的影响，激光脉冲能量会影响优化。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号