Femtosecond laser 3D nanofabrication in glass: enabling direct write of integrated microanofluidic chips

机译：飞秒激光在玻璃中的3D纳米加工：可直接写入集成的微/纳流体芯片

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The creation of complex three-dimensional (3D) fluidic systems composed of hollow micro- and nanostructures embedded in transparent substrates has attracted significant attention from both scientific and applied research communities. However, it is by now still a formidable challenge to build 3D micro- and nanofluidic structures with arbitrary configurations using conventional planar lithographic fabrication methods. As a direct and maskless fabrication technique, femtosecond laser micromachining provides a straightforward approach for high-precision spatial-selective modification inside transparent materials through nonlinear optical absorption. Here, we demonstrate rapid fabrication of high-aspect-ratio micro- and/or nanofluidic structures with various 3D configurations in glass substrates by femtosecond laser direct writing. Based on this approach, we demonstrate several functional micro- and nanofluidic devices including a 3D passive microfluidic mixer, a capillary electrophoresis (CE) analysis chip, and an integrated micro-nanofluidic system for single DNA analysis. This technology offers new opportunities to develop novel 3D micro-nanofluidic systems for a variety of lab-on-a-chip applications.

机译：由嵌入透明基板中的中空微结构和纳米结构组成的复杂三维（3D）流体系统的创建引起了科学界和应用研究界的极大关注。但是，到目前为止，使用常规的平面光刻制造方法来构建具有任意配置的3D微流体和纳米流体结构仍然是一个艰巨的挑战。飞秒激光微加工作为一种直接的无掩模制造技术，为通过透明的非线性光学吸收在透明材料内部进行高精度的空间选择性修饰提供了一种直接的方法。在这里，我们演示了通过飞秒激光直接写入在玻璃基板中快速制造具有各种3D配置的高纵横比微和/或纳米流体结构的方法。基于这种方法，我们演示了几种功能性的微流体和纳米流体设备，包括3D被动微流体混合器，毛细管电泳（CE）分析芯片和用于单个DNA分析的集成微纳米流体系统。这项技术为开发适用于各种芯片实验室应用的新颖3D微纳米流体系统提供了新的机会。

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来源
《Laser applications in microelectronic and optoelectronic manufacturing (LAMOM) XIX》|2014年|896708.1-896708.12|共12页
会议地点 San Francisco CA(US)
作者
Ya Cheng; YangLiao; Koji Sugioka;
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作者单位

State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China;

State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, P.O. Box 800-211, Shanghai 201800, China;

RIKEN-SIOM Joint Research Unit, RIKEN, Hirosawa 2-1, Wako, Saitama 351-0198, Japan;

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正文语种 eng
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关键词
femtosecond laser; direct write; three dimensional; nanofabrication; microfluidics; nanofluidics;

机译：飞秒激光直接写三维纳米加工微流体纳米流体;

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专利

1. Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis [J] . Xu Jian, Wu Dong, Ip Joanna Y., RSC Advances . 2015,第31期

机译：使用水飞秒激光制造技术将垂直侧壁电极单片集成到3D玻璃微流控芯片中，以便对电轴进行原位控制
2. Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis [J] . Xu Jian, Wu Dong, Ip Joanna Y., RSC Advances . 2015,第31期

机译：使用水飞秒激光制造技术将垂直侧壁电极单片集成到3D玻璃微流控芯片中，以便对电轴进行原位控制
3. Vertical sidewall electrodes monolithically integrated into 3D glass microfluidic chips using water-assisted femtosecond-laser fabrication for in situ control of electrotaxis (vol 5, pg 24072, 2015) [J] . Xu Jian, Wu Dong, Ip Joanna Y., RSC Advances . 2015,第34期

机译：使用水辅助飞秒激光制造的垂直侧壁电极整体集成到3D玻璃微流体芯片中，用于对ElectrAtisis的原位控制（Vol 5，PG 24072,2015）
4. Fabrication of microreactors in photostructurable glass by 3D femtosecond laser direct write [C] . Koji Sugioka, Ya Cheng, Masashi Masuda, Conference on Photon Processing in Microelectronics and Photonics III; 20040126-20040129; San Jose,CA; US . 2004

机译：通过3D飞秒激光直接写入法在可光化玻璃中制造微反应器
5. Femtosecond Laser Direct-Write of Optofluidic Lab in Fiber through Polymer-Coated Optical Fibers [D] . Joseph, Kevin A. J. 2017

机译：飞秒激光通过聚合物涂层光纤直接写入纤维的光流体实验室
6. Femtosecond Laser Direct Writing of Integrated Photonic Quantum Chips for Generating Path-Encoded Bell States [O] . Meng Li, Qian Zhang, Yang Chen, 2020

机译：用于生成路径编码钟状态的集成光子量子芯片的飞秒激光直接写入
7. Femtosecond Laser Direct Write Integration of Multi-Protein Patterns and 3D Microstructures into 3D Glass Microfluidic Devices [O] . Daniela Serien, Hiroyuki Kawano, Atsushi Miyawaki, 2018

机译：Femtosecond激光直接写入多蛋白模式和3D微结构的三维玻璃微流体装置
8. Microfabrication with femtosecond laser processing : (A) laser ablation of ferrous alloys, (B) direct-write embedded optical waveguides and integrated optics in bulk glasses. [R] . 2004

机译：采用飞秒激光加工的微细加工：（a）铁合金的激光烧蚀，（B）直接写入嵌入式光波导和大块玻璃中的集成光学器件。

Femtosecond laser 3D nanofabrication in glass: enabling direct write of integrated microanofluidic chips

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