Laser micromachining of organic LEDs

机译：有机LED的激光微加工

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OLED lighting is expected to be one of the fastest growing markets in the area of organic electronics. The state of the art production is mainly based on vacuum deposition processes, which, in order to simplify the material handling, will most probably be embedded in a roll-to-roll environment. While reducing the handling costs also implies challenges to the patterning of the several OLED layers. Laser micromachining applying ultra-short pulsed laser sources has the potential to fully satisfy the requirements. Within this paper the latest findings on the separate scribing steps PI, P2 and P3 will be presented.

机译：OLED照明有望成为有机电子领域增长最快的市场之一。现有技术的生产主要基于真空沉积工艺，为了简化材料处理，真空沉积工艺很可能会嵌入到卷对卷环境中。在降低处理成本的同时，还暗示了对多个OLED层进行构图的挑战。应用超短脉冲激光源的激光微加工有可能完全满足要求。在本文中，将给出关于单独的划线步骤P1，P2和P3的最新发现。

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《Laser-based micro- and nanopackaging and assembly VI》|2012年|p.824409.1-824409.6|共6页
会议地点 San Francisco CA(US)
作者
Tino Petsch; Jens Hand; Maurice Clair; Christian Scholz;
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作者单位

3D-Micromac AG, Chemnitz, Germany;

3D-Micromac AG, Chemnitz, Germany;

3D-Micromac AG, Chemnitz, Germany;

3D-Micromac AG, Chemnitz, Germany;

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原文格式 PDF
正文语种 eng
中图分类激光技术、微波激射技术;
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1. Micromachining of organic polymers by X-ray photo-etching using a 10 Hz laser-plasma radiation source [J] . A. Bartnik, H. Fiedorowicz, R. Jarocki, Microelectronic Engineering . 2005,第Mar期

机译：使用10 Hz激光等离子辐射源通过X射线光刻对有机聚合物进行微加工
2. Micromachining of organic polymers by direct photo-etching using a laser plasma X-ray source [J] . H. Fiedorowicz, A. Bartnik, M. Bittner, Microelectronic Engineering . 2004,第Jun期

机译：通过使用激光等离子X射线源的直接光蚀刻对有机聚合物进行微加工
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Laser micromachining of organic LEDs

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