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首页> 外文会议>Laser-based micro- and nanopackaging and assembly IV >Single Femtosecond Pulse Nanochannel Formation In Glass
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Single Femtosecond Pulse Nanochannel Formation In Glass

机译：玻璃中的单飞秒脉冲纳米通道形成

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Single pulse femtosecond laser damage in transparent dielectrics has been shown to occur through nonlinear damage mechanisms that can allow material removal on scales well below the classical limit of the order of the wavelength of the incident light. These mechanisms can be harnessed to allow the optical machining of devices on the nanoscale.rnWe observe the formation of high aspect-ratio nanochannels by single femtosecond pulses. These channels, several microns in length, can be formed at the front or rear surface of a sample, corresponding to conditions under which spherical aberration is expected and where it is minimized. The presence of similar channels at both locations suggests that aberration does not play a critical role in nanochannel creation, and we present evidence supporting a dominant role of self focusing and microscale filamentation.rnApplications for these long nanoscale diameter channels include nanopores, nanowells, or out-of-plane vias. The ability to generate these channels with single pulses allows rapid fabrication that complements existing techniques, thus addressing a major limitation to fabrication of microfluidics and nanopores.
机译：事实证明，透明介质中的单脉冲飞秒激光损伤是通过非线性损伤机制发生的，该机制可以使材料的去除远低于入射光波长的经典极限。可以利用这些机制来对纳米级的器件进行光学加工。我们观察到由单个飞秒脉冲形成的高纵横比纳米通道。这些通道的长度为几微米，可以在样品的前表面或后表面形成，对应于预期球面像差并将其最小化的条件。在两个位置都存在相似的通道，这表明像差在纳米通道的创建中并不起关键作用，并且我们提供的证据支持自聚焦和微米级丝状化的主导作用。这些长纳米级直径通道的应用包括纳米孔，纳米孔或纳米孔。平面通孔。利用单脉冲产生这些通道的能力允许快速制造，对现有技术进行补充，从而解决了微流体和纳米孔制造的主要局限。

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