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首页> 外文会议>Laser-based micro- and nanoprocessing IX >Surface structuring of metals and non-metals for printing tools and embossing dies with an ultrafast ps-laser machining system
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Surface structuring of metals and non-metals for printing tools and embossing dies with an ultrafast ps-laser machining system

机译：超快速ps激光加工系统用于印刷工具和压印模具的金属和非金属的表面结构化

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With roll-to-roll processes, millions of reproductions (e.g. RFID-antennas or Fresnel-lenses) can be produced in a fast and economical way. The processing of replica tools for such printing and embossing applications requires in many cases sub-μm and μm-structures. Ultra-short pulse lasers with ps- and fs-pulse durations and in single pulse or burst mode operation are appropriate tools to generate this micro- or nanostructures. In recent years the ongoing development of this laser sources and of fast beam delivery optics allows higher ablation rates combined with a superior quality for several materials like copper and brass as well as glass and dielectrics. Different ps-laser systems at 10 ps with up to 80 W at 1064 nm with a pulse repetition rate up to 8 MHz and energies up to 50 μJ (at lower repetition rate) have been used in a micro-engraving system for large cylindrical workpieces. This setup allows the micro structuring of cylinder surfaces as well as the processing of thin film substrate sheets up to a thickness of approximately 300 μm. Dimensions up to 7 m face length and circumferences up to 1,3 m can be processed with an accuracy of about 1 μm. A variety of metals have been investigated by structuring 2D and 3D elements. The process is nearly melt-free, but the resulting surface structure of the ablated zone depends on the sort of metal. The high fluencies also enable the engraving of transparent materials which allow a much faster micro processing speed compared to metals. This work shows examples of micro-structuring melamine-resin coated cylinder surfaces and hybrid materials.
机译：通过卷对卷工艺，可以快速，经济地生产数百万张复制品（例如RFID天线或菲涅耳透镜）。用于这种印刷和压花应用的复制工具的加工在许多情况下需要亚微米和微米结构。具有ps和fs脉冲持续时间并以单脉冲或突发模式运行的超短脉冲激光器是生成这种微结构或纳米结构的合适工具。近年来，这种激光源和快速光束传输光学器件的不断发展允许更高的烧蚀速率以及对铜，黄铜，玻璃和电介质等多种材料的卓越品质。在大型圆柱工件的微雕刻系统中已使用了10 ps的不同ps激光系统，在1064 nm处的功率高达80 W，脉冲重复率高达8 MHz，能量高达50μJ（在较低的重复率下） 。该设置允许圆柱体表面的微结构化以及薄膜基板片材的加工，最大厚度约为300μm。可以以大约1μm的精度加工长达7 m的面长和1.3 m的周长的尺寸。通过构造2D和3D元素，已经研究了多种金属。该过程几乎没有熔化，但是烧蚀区的最终表面结构取决于金属的种类。高通量还可以雕刻透明材料，与金属相比，可以实现更快的微处理速度。这项工作显示了微结构化的三聚氰胺树脂涂层的汽缸表面和混合材料的示例。

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