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Nanosecond laser-induced nanostructuring of thin metal layers and dielectric surfaces

机译：纳秒激光诱导的薄金属层和介电表面的纳米结构

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摘要

Nanostructuring of dielectric surfaces has a widespread field of applications. In this work the recently introduced laser method validates this novel concept for complex nanostructuring of dielectric surfaces. This concept combines the mechanism of self-assembly of metal films due to laser irradiation with the concept of laser-assisted transfer of these patterns into the underlying material. The present work focuses on pattern formation in fused silica near the border of the laser spot, where distorted nested ring-like patterns were found in contrast to concentric ring patterns at homogeneous laser irradiation. For the experiments a lateral homogeneous spot of a KrF excimer laser (λ = 248 nm) and a Gaussian beam Yb fiber laser (λ = 1064 nm) was used for irradiation of a thin chromium layer onto fused silica resulting in the formation of different ring structures into the fused silica surface. The obtained structures were analysed by AFM and SEM. It is found that the mechanism comprises laser-induced metal film melting, contraction of the molten metal, and successive transfer of the metal hole geometry to the fused silica. Simulations taking into account the heat and the Navier-Stokes equations were compared with the experimental results. A good agreement of simulation results with experimental data was found. These first results demonstrate that the variation of the laser beam profile allows the local control of the melt dynamics which causes changes of the shape and the size of the ring patterns. Hence, a light-controlled self-assembly is feasible.
机译：介电表面的纳米结构具有广泛的应用领域。在这项工作中，最近引入的激光方法验证了用于介电表面复杂纳米结构的这一新颖概念。该概念将由于激光辐照导致的金属膜自组装机制与这些图案通过激光辅助转移到下层材料中的概念结合在一起。目前的工作集中在激光光斑边界附近的熔融石英中形成图案，与均匀激光照射下的同心环形图案形成对比，发现了扭曲的嵌套环状图案。为了进行实验，使用KrF准分子激光（λ= 248 nm）和高斯光束Yb光纤激光器（λ= 1064 nm）的横向均匀光斑在熔融石英上辐照薄铬层，从而形成不同的环结构进入熔融石英表面。通过AFM和SEM分析获得的结构。发现该机理包括激光诱导的金属膜熔化，熔融金属的收缩以及金属孔的几何形状向熔融二氧化硅的连续转移。将考虑了热量和Navier-Stokes方程的模拟与实验结果进行了比较。发现仿真结果与实验数据非常吻合。这些最初的结果表明，激光束轮廓的变化允许对熔体动力学进行局部控制，从而导致环形图案的形状和尺寸发生变化。因此，光控自组装是可行的。

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  • 来源
    《Laser-based micro- and nanoprocessing IX》|2015年|93511T.1-93511T.10|共10页
  • 会议地点 San Francisco CA(US)
  • 作者

    P. Lorenz; M. Kloeppel; M. Ehrhardt; K. Zimmer; P. Schwaller;

  • 作者单位

    Leibniz-Institut fuer Oberflaechenmodifizierung e. V., Permoserstr. 15, 04318 Leipzig, Germany;

    Institute of Scientific Computing, Department of Mathematics, TU Dresden, 01062 Dresden, Germany;

    Leibniz-Institut fuer Oberflaechenmodifizierung e. V., Permoserstr. 15, 04318 Leipzig, Germany;

    Leibniz-Institut fuer Oberflaechenmodifizierung e. V., Permoserstr. 15, 04318 Leipzig, Germany;

    Institute of Scientific Computing, Department of Mathematics, TU Dresden, 01062 Dresden, Germany;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    excimer laser; nanostructuring; fused silica; circular structures; simulation;

    机译：准分子激光纳米结构熔融石英圆形结构；模拟;

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