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Fundamental investigations of ps-laser burst-mode on common metals for an enhanced ablation process

机译:为增强烧蚀工艺而对常见金属进行ps激光脉冲模式的基础研究

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摘要

In this study, ps-laser micromachining of different types of metals like copper, aluminum, titanium, tungsten and zinc have been investigated. Their single-pulse damage thresholds for the laser wavelengths of 355 nm, 532 ran and 1064 nm were experimentally determined. The laser-induced surface morphology both in the low and high fluence regime, as well as in the transition area, were examined for all investigated metals by scanning electron microscopy. Single pulse experiments and multi-pulse ablation experiments for up to 6 pulses using time-delays between successive pulses of 1 s and 20 ns were carried out. Our observations show that the surface morphologies significantly change from single-pulse ablation to the application of a second pulse. By comparing different separation times in the multi-pulse experiments we show that the burst-mode in ps-laser processing accumulates heat. This results in strong arising melting films, smoothing of the ablation craters and melt splashes outside of the crater. We found out, that copper and aluminum as well as titanium and zinc show similar ablation behavior by using the burst mode.
机译:在这项研究中,已研究了不同类型的金属(如铜,铝,钛,钨和锌)的ps激光微加工。通过实验确定了它们对于355 nm,532 ran和1064 nm激光波长的单脉冲损伤阈值。通过扫描电子显微镜检查了所有被研究的金属在低和高通量范围以及过渡区域中的激光诱导的表面形态。使用1 s和20 ns连续脉冲之间的时间延迟,进行了最多6个脉冲的单脉冲实验和多脉冲消融实验。我们的观察结果表明,表面形态从单脉冲烧蚀到第二个脉冲的施加发生了显着变化。通过在多脉冲实验中比较不同的分离时间,我们表明ps激光处理中的突发模式会积聚热量。这会导致产生坚固的熔化膜,使烧蚀弹坑平滑,并在弹坑外部熔化飞溅物。我们发现,通过使用突发模式,铜和铝以及钛和锌表现出相似的烧蚀行为。

著录项

  • 来源
    《Laser-based micro- and nanoprocessing IX》|2015年|93510E.1-93510E.14|共14页
  • 会议地点 San Francisco CA(US)
  • 作者单位

    Photonik-Zentrum Kaiserslautern e.V. and Research Center Optimas, 67663 Kaiserslautern, Rhineland-Palatinate, Germany;

    Photonik-Zentrum Kaiserslautern e.V. and Research Center Optimas, 67663 Kaiserslautern, Rhineland-Palatinate, Germany;

    Photonik-Zentrum Kaiserslautern e.V. and Research Center Optimas, 67663 Kaiserslautern, Rhineland-Palatinate, Germany;

    Photonik-Zentrum Kaiserslautern e.V. and Research Center Optimas, 67663 Kaiserslautern, Rhineland-Palatinate, Germany;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Picosecond laser; single-pulse ablation; multi-pulse ablation; laser burst; metals;

    机译:皮秒激光;单脉冲消融;多脉冲消融;激光爆裂金属;

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