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首页> 外文会议>Laser-based micro- and nanoprocessing IX >Femtosecond laser-based production of 3D micro- and nano- devices in transparent substrate: a step toward system-materials
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Femtosecond laser-based production of 3D micro- and nano- devices in transparent substrate: a step toward system-materials

机译：飞秒激光在透明基板中生产3D微米和纳米器件：迈向系统材料的一步

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摘要

Femtosecond laser irradiation applied to Fused Silica (the amorphous form of SiO_2) defines a novel technology platform for highly integrated all-optical microsystems and beyond. In contrast with common approaches that rely on combining materials to achieve particular functions, femtosecond-laser fabricated microsystems rely on single material monolith, whose properties are locally and in the three-dimension functionalized by selective exposure. The combination of laser-functionalized zones with different physical properties allows us to direct-write integrated systems without the need for further assembly of packaging steps or without the need for multiple processing steps, like for instance sequences of layers deposition, exposure and etching steps.
机译：飞秒激光辐照应用于熔融石英（SiO_2的无定形形式），为高度集成的全光学微系统及以后的应用定义了一种新颖的技术平台。与依赖于组合材料以实现特定功能的常规方法相比，飞秒激光制造的微系统依赖于单一材料的整体结构，其整体性能是局部的，并通过选择性曝光而在三维上实现了功能化。具有不同物理特性的激光功能化区域的组合使我们可以直接写入集成系统，而无需进一步组装包装步骤或不需要多个处理步骤，例如层沉积，曝光和蚀刻步骤的顺序。

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