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High resolution multiphoton ablation with negligible thermal effects in transparent materials using Q-switched microchip lasers with 300 picosecond pulses at 532nm

机译:使用Q开关微芯片激光器在532nm处具有300皮秒的脉冲,对透明材料中的高分辨率多光子烧蚀具有可忽略的热效应

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摘要

Self-Q-switched microchip lasers are attractive alternative to femtosecond lasers for micromachining in transparent materials. They can easily reach pulse peak powers needed to trigger ablation in all materials, including diamond, ceramics, plastics, and glasses. In addition, they are low cost with compact and rugged design. In this work, we report on using microchip lasers for micro-engraving different types of transparent materials. Micro-size marking is demonstrated on the surface of borosilicate glass. Microfluidic channels are engraved on BK-7 glass microchips with ion-doped waveguides. Arrays of dense micro-channels are fabricated at the surface of thermoplastics with a zone affected by thermal effects limited to the micron range.
机译:自调Q微芯片激光器是飞秒激光器在透明材料中进行微加工的诱人替代品。它们可以轻松达到触发所有材料烧蚀所需的脉冲峰值功率,包括金刚石,陶瓷,塑料和玻璃。此外,它们具有紧凑耐用的设计,价格低廉。在这项工作中,我们报告了使用微芯片激光器对不同类型的透明材料进行微雕刻。硼硅酸盐玻璃表面显示出微尺寸标记。微流体通道被刻在带有离子掺杂波导的BK-7玻璃微芯片上。在热塑性塑料的表面上制作了密集的微通道阵列,其受热影响的区域限制在微米范围内。

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