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Rapid fabrication of microdevices using laser direct writing and replica moulding technique

机译:使用激光直接写入和复制成型技术快速制造微型设备

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摘要

This paper presents a method that enables fast and low-cost fabrication of microchannels with oval cross-section. The procedure is based on formation of a concave meniscus at the interface between an initially cured PDMS and a polymeric mould fabricated using excimer laser. The replica is formed by expanding gas trapped within the structures of the mould during thermal curing. A second shaping factor is connected with surface phenomena at the interface between the mould, gas and partially cured PDMS. The final shape of the meniscus is determined when the PDMS reaches the high cure extent.
机译:本文提出了一种方法,可以快速,低成本地制造具有椭圆形横截面的微通道。该程序基于在最初固化的PDMS与使用准分子激光制造的聚合物模具之间的界面处形成凹弯月面。通过使热固化过程中捕获在模具结构内的气体膨胀来形成复制品。第二个成型因素与在模具,气体和部分固化的PDMS之间的界面处的表面现象有关。当PDMS达到高固化程度时,确定弯液面的最终形状。

著录项

  • 来源
    《Laser-based micro- and nanoprocessing X》|2016年|973609.1-973609.6|共6页
  • 会议地点 San Francisco CA(US)
  • 作者单位

    Laser and Fibre Electronics Group, Faculty of Electrical Engineering, Wroclaw University of Technology, Wyb. Wyspianskiego 27, 50-370 Wroclaw, Poland;

    Faculty of Microsystems Electronics and Photonics, Wroclaw University of Technology, Wyb. Wyspianskiego 27, 50-370 Wroclaw, Poland;

    Laser and Fibre Electronics Group, Faculty of Electrical Engineering, Wroclaw University of Technology, Wyb. Wyspianskiego 27, 50-370 Wroclaw, Poland;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    microfluidics; Lab On a Chip; laser micromachining; polydimethylsiloxane PDMS; replica moulding;

    机译:微流体芯片实验室激光微加工聚二甲基硅氧烷PDMS;复制品成型;

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