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Electro-optic and acousto-optic laser beam scanners

机译：电光和声光激光束扫描仪

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摘要

Electro-optical deflectors (EOD) and acousto-optical deflectors (AOD) are based on deflection of laser light within a solid state medium. As they do not contain any moving parts, they yield advantages compared to mechanical scanners which are conventionally used for laser beam deflection. Even for arbitrary scan paths high feed rates can be achieved. In this work the principles of operation and characteristic properties of EOD and AOD are presented. Additionally, a comparison to mirror based mechanical deflectors regarding deflection angles, speed and accuracy is made in terms of resolvable spots and the rate of resolvable spots. Especially, the latter one is up to one order of magnitude higher for EOD and AOD systems compared to conventional systems. Further characteristic properties such as response time, damage threshold, efficiency and beam distortions are discussed. Solid state laser beam deflectors are usually characterized by small deflection angles but high angular deflection velocities. As mechanical deflectors exhibit opposite properties an arrangement of a mechanical scanner combined with a solid state deflector provides a solution with the benefits of both systems. As ultrashort pulsed lasers with average power above 100 W and repetition rates in the MHz range have been available for several years this approach can be applied to fully exploit their capabilities. Thereby, pulse overlap can be reduced and by this means heat affected zones are prevented to provide proper processing results.
机译：电光偏转器（EOD）和声光偏转器（AOD）基于固态介质中激光的偏转。由于它们不包含任何运动部件，因此与常规用于激光束偏转的机械扫描仪相比，它们具有优势。即使对于任意扫描路径，也可以实现高进给速度。在这项工作中，介绍了EOD和AOD的工作原理和特性。另外，在可分辨光斑和可分辨光斑的比率方面，与基于反射镜的机械偏转器的偏转角，速度和精度进行了比较。特别是，与传统系统相比，对于EOD和AOD系统，后者要高出一个数量级。讨论了其他特性，例如响应时间，损伤阈值，效率和光束失真。固态激光束偏转器通常以小偏转角但高偏转角为特征。由于机械偏转器表现出相反的特性，因此将机械扫描仪与固态偏转器结合使用可提供一种兼具两个系统优势的解决方案。由于平均功率超过100 W且重复频率在MHz范围内的超短脉冲激光器已有数年的历史，因此该方法可用于充分利用其功能。由此，可以减少脉冲重叠，并且由此防止热影响区域以提供适当的处理结果。

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  • 来源
    《Laser-based micro- and nanoprocessing X》|2016年|97360L.1-97360L.10|共10页
  • 会议地点 San Francisco CA(US)
  • 作者

    Johannes Heberle; Peter Bechtold; Johannes Strauss; Michael Schmidt;

  • 作者单位

    Institute of Photonic Technologies, Friedrich- Alexander University Erlangen-Nuernberg, Konrad-Zuse-Strasse 3/5, 91052 Erlangen, Germany,Erlangen Graduate School in Advanced Optical Technologies, Friedrich-Alexander University Erlangen-Nuernberg, Paul-Gordan-Strasse 6, 91052 Erlangen, Germany;

    Institute of Photonic Technologies, Friedrich- Alexander University Erlangen-Nuernberg, Konrad-Zuse-Strasse 3/5, 91052 Erlangen, Germany,Erlangen Graduate School in Advanced Optical Technologies, Friedrich-Alexander University Erlangen-Nuernberg, Paul-Gordan-Strasse 6, 91052 Erlangen, Germany;

    Institute of Photonic Technologies, Friedrich- Alexander University Erlangen-Nuernberg, Konrad-Zuse-Strasse 3/5, 91052 Erlangen, Germany,Erlangen Graduate School in Advanced Optical Technologies, Friedrich-Alexander University Erlangen-Nuernberg, Paul-Gordan-Strasse 6, 91052 Erlangen, Germany;

    Institute of Photonic Technologies, Friedrich- Alexander University Erlangen-Nuernberg, Konrad-Zuse-Strasse 3/5, 91052 Erlangen, Germany,Erlangen Graduate School in Advanced Optical Technologies, Friedrich-Alexander University Erlangen-Nuernberg, Paul-Gordan-Strasse 6, 91052 Erlangen, Germany;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    laser beam scanner; electro-optical deflector; acousto-optical deflector;

    机译：激光扫描仪电光偏转器；声光偏转器;

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