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Nanoimprinted SU-8 Nanopillars and Hierarchically Branched Nanowires by Anodic Aluminum Oxide Templates and Their Optical Properties

机译：阳极氧化铝模板对纳米压印的SU-8纳米柱和分层分支的纳米线及其光学性质的影响

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摘要

We fabricated well-dispersed SU-8 nanopillars and hierarchically branched nanowires using nanoimprinted method. Anodic aluminum oxide (AAO) templates with branched pore structures were used as templates. We successfully fabricated high density, large aspect ratio, and large area SU-8 patterns. It provides a convenient and powerful approach to produce complicated nanostructures on SU-8 photoresist. The optical reflectivity was measured to characterize the SU-8 surface. Unique optical properties could be observed from these SU-8 nanopillar structures.
机译：我们使用纳米压印法制造了分散良好的SU-8纳米柱和分层分支的纳米线。使用具有分支孔结构的阳极氧化铝（AAO）模板作为模板。我们成功地制作了高密度，大纵横比和大面积SU-8图案。它提供了一种方便而强大的方法来在SU-8光致抗蚀剂上生产复杂的纳米结构。测量光反射率以表征SU-8表面。从这些SU-8纳米柱结构可以观察到独特的光学性能。

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  • 会议地点 Las Vegas NV(US);Las Vegas NV(US)
  • 作者

    Jun Fang; Youngsik Song; Zhi Chen;

  • 作者单位

    Department of Electrical and Computer Engineering and Center for Nanoscale Science and Engineering, University of Kentucky, Lexington, KY, USA;

    Department of Electrical and Computer Engineering and Center for Nanoscale Science and Engineering, University of Kentucky, Lexington, KY, USA;

    Department of Electrical and Computer Engineering and Center for Nanoscale Science and Engineering, University of Kentucky, Lexington, KY, USA;

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  • 正文语种 eng
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