Micromachined RF-filters for Millimeter wave communications are expected to replace the actual bulky off-chip filters since they offer high performances at low cost. Nevertheless, their large aspect ratio between area (several mm2) and their thickness (a few microns) may make them sensitive to mechanical stress such as vibrations or shocks. In this paper, we focus on their mechanical characteristics. The studied filters are built on a thin SiO2/SixNy dielectric membrane and the signal lines are in gold. This composition of material makes the analytical approach rapidly complex. So, in counterparts, we ran FEM simulations to study the influence of process parameters such as stress on flexion modes. Then, we measured by vibrometry the natural resonant frequency of several filter sizes (from 1 mm2 up to 70 mm2) and compared results with previous simulations. Finally, we applied at die level, standard procedures of shock and vibration used for space qualification. All the membranes withstood the tests without structural damage.
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机译：毫米波通信用微加工RF滤波器有望代替实际的笨重片外滤波器，因为它们以低成本提供了高性能。但是，它们在面积（几个mm 2 ）和厚度（几个微米）之间的宽高比可能使它们对机械应力（例如振动或冲击）敏感。在本文中，我们专注于它们的机械特性。所研究的滤波器建立在薄的SiO 2 / Si x N y 介电膜上，信号线为金。材料的这种成分使分析方法迅速复杂化。因此，在同行中，我们进行了FEM仿真，以研究应力等工艺参数对屈曲模式的影响。然后，我们通过振动测量法测量了几种滤波器尺寸（从1 mm 2 到70 mm 2 ）的自然共振频率，并将结果与以前的仿真进行了比较。最后，我们在模具级，冲击和振动的标准程序上进行了空间验证。所有的膜都经受住了测试，没有结构损坏。
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