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A novel electrically controlled flexible liquid micro lens

机译:新型电控柔性液体微透镜

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摘要

In this paper we present an electrically controlled flexible liquid micro lens realized by micro fabrication techniques. The base material is a silicon wafer building a sealed chamber with a compliant nitride diaphragm filled with a transparent liquid. The focus of this optical system can be controlled by varying the pressure through heating of the working fluid. With this device a laser beam has been focused and defocused successfully.
机译:在本文中,我们介绍了一种通过微制造技术实现的电控柔性液体微透镜。基础材料是硅晶片,该晶片构建了一个密封腔室,该腔室具有填充有透明液体的顺应性氮化膜。可以通过加热工作流体来改变压力,从而控制该光学系统的焦点。使用该设备,激光束已成功聚焦和散焦。

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