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Construction kit for microoptical systems on the basis of microoptical benches

机译：基于微光学平台的微光学系统构建套件

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Manufacturing test structures of microsensors and microactuators is very expensive in terms of time and materials. In a conventional design process, this limits the number of design variants to be considered. For this reason, computer-supported design techniques are gaining importance in microsystems technologies. In contrast to microelectronics which may be considered two-dimensional in first approximation, a number of microoptical systems extend over three dimensions. As a consequence, a monolithic setup of such systems is not possible, as this would give rise to topological and geometric problems. Another reason for the modular concept of complex microoptical systems is the lacking of a uniform material system (in contrast to microelectronics). The modular setup of these hybrid systems results in an isolated manufacture of the individual components and their later assembly in a single system. An important aspect of construction is to ensure a certain functionality of the combined system, which is closely linked with the geometry of the structure and the application conditions. To maintain the overall function of a microsystem under the given manufacturing conditions and application environments to be expected, the system design has to be checked for interactions and adjusted accordingly. Hence, simulation of microsystems as a function of performance-reducing impacts plays a crucial role. The concept presented in this paper is the computer-aided design of a modular system on the basis of a microoptical construction kit of reusable models of fundamental microoptical elements.
机译：就时间和材料而言，制造微传感器和微致动器的测试结构非常昂贵。在常规设计过程中，这限制了要考虑的设计变体的数量。因此，计算机支持的设计技术在微系统技术中变得越来越重要。与在第一近似中可以认为是二维的微电子学相反，许多微光学系统在三个维度上延伸。结果，这种系统的整体设置是不可能的，因为这将引起拓扑和几何问题。复杂的微光学系统的模块化概念的另一个原因是缺乏统一的材料系统（与微电子系统相反）。这些混合系统的模块化设置导致单个组件的隔离制造及其以后在单个系统中的组装。结构的一个重要方面是确保组合系统的某些功能，该功能与结构的几何形状和应用条件紧密相关。为了在给定的制造条件和应用环境下维持微系统的整体功能，必须检查系统设计的相互作用并进行相应调整。因此，作为降低性能影响的函数的微系统仿真起着至关重要的作用。本文介绍的概念是在基于基本微光学元件可重用模型的微光学构造套件的基础上，对模块化系统进行计算机辅助设计。

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