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Development of thin-film flat-panel arrays for diagnostic and radiotherapy imaging

机译:用于诊断和放射治疗成像的薄膜平板阵列的开发

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Abstract: Since the design and fabrication of the first pixelated, two- dimensional, hydrogenated amorphous silicon image sensor arrays at Xerox, PARC, in 1988, a variety of milestones have been achieved including the first demonstration of high quality radiographic images of low-contrast, anatomical detail. Current array configurations and design rules offer the prospect of 100 $mu@m pixel pitches over 30 by 30 cm$+2$/ areas in the next few years. Beyond this, present attempts to extend the size of the substrates to 100 cm on the diagonal by 1996 coupled with the possibility of three-dimensional thin-film electronics could eventually result in a revolution in many forms of x-ray imaging. Such arrays will present challenges in the design of the fast, analog, and digital electronic readout systems required to precisely match the characteristics of the arrays to those of the imaging needs. For such arrays, one of the most important parameters is the dynamic range. Early results are reported for the measured limits on this quantity as obtained through measurements from individual sensors and FETs as well as an improved lower limit as obtained by direct measurements of array pixels. !18
机译:摘要:自1988年在PARC的Xerox设计并制造出第一个像素化的二维氢化非晶硅图像传感器阵列以来,已经取得了一系列里程碑式的成就,包括首次展示了低对比度的高品质射线照相图像,解剖细节。当前的阵列配置和设计规则将在未来几年内在30 x 30 cm $ + 2 $ /的面积上提供100μm的像素间距。除此之外,目前的尝试是在1996年之前将对角线基板的尺寸扩展到100厘米,再加上三维薄膜电子设备的可能性,最终可能导致许多形式的X射线成像革命。这样的阵列将在快速,模拟和数字电子读出系统的设计中提出挑战,这些系统需要使阵列的特性与成像需求精确地匹配。对于此类阵列,最重要的参数之一是动态范围。对于通过单个传感器和FET的测量获得的该量的测量极限,以及通过直接测量阵列像素获得的改进的下限,都报告了早期结果。 !18

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