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Acceleration of yield enhancement activity by utilizing real-time fail bitmap analysis

机译:利用实时故障位图分析加速产量提高活动

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A methodology to enhance baseline yield by utilizing fail bitmap (FBM) analysis is presented in this paper. Yield impact of each process step is estimated from FBM-defect correlation and FBM classification. Statistical accuracy of the data is evaluated by using actual wafer-to-wafer variation of our fab, and is significantly improved by increasing FBM sample size. In order to analyze a large amount of data in real-time manner, throughput of the data analysis is also enhanced by an automated system for timely data feedback to yield enhancement activities.
机译:本文提出了一种通过利用故障位图(FBM)分析来提高基准产量的方法。每个工艺步骤的产量影响都可以通过FBM-缺陷相关性和FBM分类来估算。数据的统计准确性是通过使用我们晶圆厂的实际晶圆间差异来评估的,并且通过增加FBM样本大小来显着提高数据的准确性。为了实时分析大量数据,还通过自动化系统提高了数据分析的吞吐量,以便及时进行数据反馈以产生增强活动。

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