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New chemical removing and air cooling technology for clean room recirculation air using chilled pure water showering method

机译：采用冷冻纯净水淋洗法的洁净室循环空气新的化学去除和空气冷却技术

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We have developed a new chemical removing and air cooling technique for clean room recirculation air using a gas-liquid contact method that consists of a combination of chilled pure water showering and optimum packing material. We have tested a new treatment system using this technique in an actual photolithography clean room finding many kinds of chemical contaminants of water-solubility substances such as NH/sub 4//sup +/ and amine ions, and have found it to be a sufficiently practical wet-type filtration method having both functions of chemical cleanliness control and air cooling capacity control. In addition, this new system has a very simple structure, less power consumption and is maintenance free. Furthermore, the total cost including the initial and running cost of the new wet-type chemical filtration system for clean room recirculation air using our new technique can be reduced by about 30%, as compared with that of a conventional dry-type chemical filter removal system.
机译：我们已经开发出一种新的化学去除和空气冷却技术，该技术使用气液接触方法对洁净室的循环空气进行处理，该方法由冷冻纯净水喷淋和最佳包装材料组成。我们已经在实际的光刻无尘室中使用这种技术测试了一种新的处理系统，发现了水溶性物质如NH / sub 4 // sup + /和胺离子的多种化学污染物，并且发现它已经足够具有化学清洁度控制和空气冷却能力控制功能的实用的湿式过滤方法。另外，该新系统具有非常简单的结构，较少的功耗并且无需维护。此外，与传统的干式化学过滤器拆除相比，使用我们的新技术的用于洁净室再循环空气的新型湿式化学过滤系统的总成本（包括初始成本和运行成本）可减少约30％。系统。

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