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RF thermal plasma treatment for size reduction and spheroidization of glass powders used in ceramic electronic devices

机译：射频热等离子体处理可减小陶瓷电子设备中使用的玻璃粉的尺寸并使其球形化

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Summary form only given. Very fine spherical glass powders are key ingredients in the sintering or package processes to achieve high performance of ceramic electronic devices, such as MLCC (multi layer ceramic capacitor), LTCC (low temperature co-fired ceramics) and PDP (plasma display panel). To provide much finer glass powders with nano-sized spherical shape, a RF (radio-frequency) thermal plasma is employed in our work as a clean heat source for a size-reducing and spheroidizing process of coarse glass powders. As reported earlier by other researchers, very hot flame from thermal plasma generators can easily evaporate refractive materials, and then reduce their size by condensing the droplets rapidly. In our thermal plasma treatment, SEM images and particle size analyzer indicate that most of coarse glass powders with average diameter of 2 mm are reformed into spherical ones with the size of below 300 nm by a high powered 4 MHz RF plasma of 20 kW. The compositions of glass powders before and after the plasma treatment are also compared by an ICP analysis, and they show negligible changes of less than 2% during the RF thermal plasma process, which demonstrates a successful preparation of nano-sized glass powders for the advanced ceramic electronic applications. Further experiments with different operating values of RF power, size of precursor and powder feed rate, are made and operating variable effects on the glass powder characteristics are discussed
机译：仅提供摘要表格。极细的球形玻璃粉是烧结或封装过程中的关键成分，以实现陶瓷电子设备的高性能，例如MLCC（多层陶瓷电容器），LTCC（低温共烧陶瓷）和PDP（等离子显示面板）。为了提供纳米级球形的精细得多的玻璃粉末，在我们的工作中采用了RF（射频）热等离子体作为清洁热源，以进行粗化玻璃粉末的尺寸减小和球化处理。正如其他研究人员先前所报道的那样，来自热等离子体发生器的非常热的火焰很容易蒸发折射材料，然后通过迅速冷凝液滴来减小其尺寸。在我们的热等离子体处理中，SEM图像和粒度分析仪表明，大多数平均直径为2 mm的粗玻璃粉末会通过20 kW的高功率4 MHz RF等离子体重整为尺寸小于300 nm的球形玻璃粉末。还通过ICP分析比较了等离子体处理前后玻璃粉的成分，在RF热等离子体处理过程中，玻璃粉的变化可忽略不计，变化小于2％，这表明成功制备了用于先进技术的纳米级玻璃粉陶瓷电子应用。进行了具有不同射频功率操作值，前驱体尺寸和粉末进料速率的进一步实验，并讨论了操作变量对玻璃粉末特性的影响

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