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首页> 外文会议>International conference on mechatronics technology >Finite Element Algorithm of Static Characteristics of Ultraprecision Hydrostatic Slide
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Finite Element Algorithm of Static Characteristics of Ultraprecision Hydrostatic Slide

机译：Ultrapistion静压幻灯片静态特性有限元算法

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摘要

Hydrostatic slides is one of most important component in ultra-precision machine tools,which provides extremely smooth and accurate motion and positioning.Carrying capability,stiffness and angular stiffness are important performance parameters of hydrostatic slides.Traditionally,slide stiffness is calculated by engineering approximate,which is less accuracy.Besides,engineering approximation can not calculate vertical and horizontal stiffness simultaneously and is unable to predict angular stiffness,although these parameters are important for successful design of hydrostatic slides.In this paper,we propose to use finite element method to simulate performance of slides under working condition.Dimensionless Reynolds equation was processed to acquire the pressure distribution of oil film of slide,thereby the carrying capacity,stiffness and angular stiffness of hydrostatic slide.The experiments indicated that characteristics of the slide can be successfully predicted by finite element calculations.
机译：静电载玻片是超精密机床中最重要的组件之一，可提供极其光滑和精确的运动和定位。散流幻灯片的重要性，刚度和角度刚度是重要的性能参数。通过工程近似计算滑动刚度，这缺少的准确性。基础，工程近似不能同时计算垂直和水平刚度，并且无法预测角度刚度，尽管这些参数对于成功设计静水压幻灯片的设计很重要。在本文中，我们建议使用有限元方法来模拟在工作条件下的幻灯片的性能。加工拉动雷诺等式以获取滑块的油膜的压力分布，从而静水滑动件的承载力，刚度和角度刚度。实验表明，可以通过有限预测载玻片的特性元素计算狮子。

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