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Optimization of d-doped AlInAs/InGaAs HEMT performance using spacer layer and d-doping

机译:用间隔层和D掺杂优化D-掺杂的Alinas / InGaas HEMT性能

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In this paper efforts have been made to optimize the performance of delta (δ) doped 0.5 µm gate length InP based In0.53Ga0.47As/In0.52Al0.48As high electron mobility transistor with the help of some parameters as δ-doping and spacer layer thickness variation. We perform characterization studies on high density two-dimensional electron gas (2DEG), conduction band discontinuity (ΔEC), threshold voltage (Vth), transconductance (gm), cut-off frequency (fT), confined in lattice-matched InP based d-doped In0.53Ga0.47As/In0.52Al0.48As quantum wells HEMT grown by molecular beam epitaxy (MBE) on InP substrate. The impact of parameters (δ doping and spacer layer) variation on the conduction band discontinuity, high density 2DEG and optimization of the performance of HEMT has been analysed. These values then utilize to optimize figure of merit such as transconductance and cut-off frequency of device.
机译:在本文中,已经努力优化基于 0.53 GA 0.52 0.52 0.52 AL 0.48 在一些参数的帮助下,作为Δ掺杂和间隔层厚度变化的帮助。我们在高密度二维电子气体(2deg),导带不连续(ΔEC),阈值电压(V TH ),跨导(G M )上进行表征研究,截止频率(F T )限制在晶格匹配的基于INP的D-D-DOPED中,掺杂在 0.53 GA 0.47 AS / IN 0.52 al 0.48 通过分子束外延(MBE)在INP基板上生长的量子阱HEMT。已经分析了参数(δ掺杂和间隔层)对导带不连续,高密度2DEG的影响,以及HEMT性能的优化。然后,这些值利用来优化诸如设备的跨导和截止频率的优点。

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