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A laser produced plasma sustained by a radiofrequency source

机译:激光产生的等离子体由射频源维持

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Summary form only given. The creation of a high-density plasma ina high pressure environment is studied. The plasma is generated byphotoionization of the organic seed moleculetetrakis(dimethylamino)ethylene (TMAE) and is sustained by RF couplingthrough the use of an antenna. The coupled power is a function ofantenna configuration, plasma density, working gas and applied magneticfield. Previous studies have utilized these antennas to couple power tothe plasma through the inductive mode of operation. The inductive sourceoperates by coupling power to the plasma through collisional ohmicheating of the wave energy. Helicon antennas have been shown to be veryefficient sources in the low pressure argon regime with densities of theorder of 4×1012 cm-3 with only 600 W ofpower in a 5 cm radius tube. The VUV laser in this experiment hascreated plasmas of order 1014 cm-3. The highdensity gives a high condition which allows higher radiation resistanceof the antenna and more power to couple the plasmas. The use ofdifferent working gasses is explored and the results are compared andinterpreted. The computer codes, ANTENNA2 and MAXEB are used to optimizethe experiment and interpret results. The radiation resistance ismeasured using a network analyzer, and compared to code results. Theplasma parameters are measured by Langmuir probes and optical emissionspectra
机译:仅提供摘要表格。高密度等离子体的产生 研究了高压环境。等离子体是由 有机种子分子的光电离 四(二甲基氨基)乙烯(TMAE),并通过RF耦合维持 通过使用天线。耦合功率是 天线配置,等离子体密度,工作气体和施加的磁场 场地。先前的研究已经利用这些天线将功率耦合到 等离子体通过感应操作模式。感应源 通过通过碰撞欧姆将功率耦合到等离子体来进行操作 波能的加热。螺旋天线已被证明是非常 低压氩气条件下的高效气源 只有600 W的功率为4×10 12 cm -3 的量级 在半径为5厘米的管子中通电。该实验中的VUV激光具有 产生了等离子10 14 cm -3 的等离子体。高 密度高的条件允许更高的抗辐射性 天线的功率和耦合等离子体的更多功率。指某东西的用途 探索了不同的工作气体并比较了结果,并 解释。计算机代码ANTENNA2和MAXEB用于优化 实验并解释结果。辐射电阻为 使用网络分析仪进行测量,并与代码结果进行比较。这 血浆参数通过Langmuir探针和光发射进行测量 光谱

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