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THE OXIDATION BEHAVIOR OF ULTRAFINE SiC PARTICLES PREPARED BY PCVD

机译:PCVD法制备超细SiC颗粒的氧化行为

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Oxygen content in an ultrafine non-oxide ceramic powder is an important feature for the powder quality. How the oxygen content is controlled at a least level has become a challenging engineering problem. Based on characterization of the SiC powder prepared with a plasma chemical vapor deposition process in an average size range from 0.05 to 0.25 μm, the oxidation behavior of the SiC particles is assessed in this paper. The exsiting states of oxygen in the powder are qualitatively and quantitatively determined. Tests are also carried out on the adsorption of oxygen on the particles exposed to dry air.
机译:超细非氧化物陶瓷粉末中的氧含量是粉末质量的重要特征。如何将氧含量控制在最低水平已成为具有挑战性的工程问题。基于等离子化学气相沉积工艺制备的SiC粉末的特征,平均尺寸范围为0.05至0.25μm,本文评估了SiC颗粒的氧化行为。定性和定量地确定粉末中氧气的存在状态。还对暴露于干燥空气的颗粒上的氧吸附进行了测试。

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