Investigation of Aluminum Whisker Growth on Multilevel Metallization

机译：多级金属化过程中铝晶须生长的研究

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Heating wafers under vacuum is one way of releasing trapped or tightly bonded moisture from a wafer and prevents the release of gasses from wafers heated during the process. This paper describes the asymmetric thermal stress comes from thermal shock of lamp module degas process (>350°C) and results in Aluminum whisker growth in via regions. Furthermore, no whiskers are observed in symmetric PVD heater degas process with higher temperature (500°C)

机译：在真空下加热晶片是一种从晶片上释放捕获的或紧密结合的水分的方法，可以防止在处理过程中加热的晶片上释放出气体。本文描述了不对称的热应力来自灯模块脱气过程（> 350°C）的热冲击，并导致过孔区域中的铝晶须生长。此外，在较高温度（500°C）的对称PVD加热器脱气过程中未观察到晶须

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《International VLSI multilevel interconnection conference;VMIC》|2000年|p.320-322|共3页
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Rong-Jie Chein; Wen-Chen Lien; Yi-Yueh Chen;
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中图分类无线电电子学、电信技术;
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1. Morphology and growth mechanism of alumina whiskers in aluminum-based metal matrix composites [J] . Y-F. Li, C-D. Qin, D.H.L. Ng Journal of Materials Research . 1999,第7期

机译：铝基金属基复合材料中氧化铝晶须的形貌与生长机理
2. Investigation of relation between intermetallic and tin whisker growths under ambient condition [J] . K.S. Kim, C.H. Yu, S.W. Han, Microelectronics reliability . 2008,第1期

机译：环境条件下金属间晶须和锡晶须生长关系的研究
3. Growth mechanism of aluminum nitride whiskers prepared from a (glutarato)(hydroxo)aluminum(Ⅲ) complex [J] . Woo-Sik Jung, Tae Jin Lee, Bong-Ki Min Materials Letters . 2003,第26a27期

机译：由（戊二酸）（羟基）铝（Ⅲ）配合物制备的氮化铝晶须的生长机理
4. Investigation of Sn whisker growth in the matte Sn/Alloy 42 substrate coated different metallic layers [C] . 2010 5th International Microsystems Packaging Assembly and Circuits Technology Conference . 2010

机译：覆盖不同金属层的哑光Sn / Alloy 42基体中锡晶须生长的研究
5. FATIGUE CRACK INITIATION AND MICROCRACK GROWTH IN SILICON-CARBIDE WHISKER REINFORCED 2124 ALUMINUM ALLOY (COMPOSITE, METAL MATRIX, FRACTURE). [D] . WILLIAMS, DAVID ROBERT. 1985

机译：碳化硅晶须增强2124铝合金（复合材料，金属基体，断裂）的疲劳裂纹萌生和微裂纹生长。
6. Investigation of Compressive and Tensile Behavior of Stainless Steel/Dissolvable Aluminum Bimetallic Composites by Finite Element Modeling and Digital Image Correlation [O] . Xiuhui Li, Morteza Ghasri-Khouzani, Abdoul-Aziz Bogno, 2021

机译：用有限元建模和数字图像相关性研究不锈钢/可溶性铝双金属复合材料的压缩和拉伸行为
7. Magnesium Hydride Whiskers: Facile In Situ Synthesis of Micro/Nano Structured MgH2 Whiskers and Investigation of Their Growth Mechanisms (Crystal Research and Technology 10/2018) [O] . 2018

机译：氢化镁晶须：适合于Micro / Nano结构MGH2晶须的漂亮合成，对其生长机制的调查（Crystal Research And Technology 10/2018）
8. Investigation of Crystal Growth in Zero Gravity Environment and Investigation of Metallic Whiskers [R] . Davis, J. H., Lal, R. B., Walter, H. U., 1972

机译：零重力环境中晶体生长的研究及金属晶须的研究

Investigation of Aluminum Whisker Growth on Multilevel Metallization

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