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Mechatronic Design of an Ultra Precision Magnetically Supported Rotor and Linear Slider for Optical Disk

机译:用于光盘的超精密磁性支撑转子的机电调整设计和用于光盘的线性滑块

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This paper gives an overview of the work performed on the magnetically levitated linear slider with nanometre resolution at the Delft University of Technology. The linear slider has its application in the field of optical disc mastering. A low stiffness design concept was applied in combination with magnetic bearings to achieve high position resolution With standard linear control technology a 0.2 nm (la) servo error was realised. By exploiting the over actuation present in the actuators the error was reduced to 58 pm (I0).
机译:本文概述了在Delft技术大学的纳米分辨率上对磁悬浮线性滑块进行的工作概述。线性滑块在光盘母带磁盘领域具有其应用。将低刚度设计概念与磁轴承相结合应用,以实现具有标准线性控制技术的高位置分辨率,实现了0.2nm(La)伺服误差。通过利用致动器中的过度致动,误差减少到58 pm(i0)。

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