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Transmitted diffraction grating utilizing high diffraction order for a spectrometer

机译:利用光谱仪的高衍射级的透射型衍射光栅

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We propose a transmitted diffraction grating utilizing high diffraction order, which is useful for a spectrometer. In this paper, this grating is designed, fabricated and measured. This transmitted diffraction grating was designed as a shape of a triangular-groove consisting of reflective and refractive surface, not two refractive surfaces. The replica of this grating can be fabricated through hot-embossing process using a triangular-groove mould. Finally, this grating consisting of reflective and refractive surfaces can be obtained using shadowing effect in thermal evaporation process, which can help to coat metal on only one surface, not the other surface. Since each groove in this grating consists of reflective surface at one side and refractive surface at the other side, there are two high diffraction orders. Using theperiod of 3 p and the thickness of 2.119 p in visible wavelength, a -4th and -10thdiffraction order occur. Considering the high diffraction order can provide high resolving power in a spectrometer, this grating is very applicable to a compact and slim spectrometer.
机译:我们提出了利用高衍射级的透射衍射光栅,这对于光谱仪是有用的。在本文中,该光栅被设计,制造和测量。该透射衍射光栅被设计成由反射和折射表面而不是两个折射表面组成的三角形凹槽的形状。该光栅的复制品可以通过使用三角凹槽模具的热压工艺来制造。最后,由反射和折射表面组成的光栅可以通过热蒸发过程中的阴影效应获得,这可以帮助仅在一个表面上涂覆金属,而不是在另一表面上涂覆金属。由于该光栅中的每个凹槽均由一侧的反射面和另一侧的折射面组成,因此有两个高衍射级。使用 周期为3 p,可见光波长为2.119 p,第-4和-10th 发生衍射顺序。考虑到高衍射级可以在光谱仪中提供较高的分辨能力,因此该光栅非常适用于紧凑而纤薄的光谱仪。

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