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首页> 外文会议>Electronics Division Meeting of the Ceramic Society of Japan >Effect of Pore Structures on the Humidity Sensitivity of TiO_2-Based Ceramic Humidity Sensors
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Effect of Pore Structures on the Humidity Sensitivity of TiO_2-Based Ceramic Humidity Sensors

机译：孔隙结构对TiO_2陶瓷湿度传感器湿度敏感性的影响

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摘要

TiO_2-based ceramic humidity sensors containing small amounts of Li_2O and V_2O_5 were prepared by a solid-reaction method. The relationship between the pore structures of the sensors and one of the most important humidity properties, hysteresis in humidity sensitivity, was studied. The humidity sensitivity was investigated by measuring the impedance of the sensors under various conditions of humidity, and the pore-size distribution was measured by mercury-intrusion porosimetry and by the nitrogen-adsorption method. The hysteresis property of the sensors was shown to be significantly dependent on their microstructure, particularly the volume ratio of mesopores to all pores in the sensor elements. Nitrogen adsorption was found to be more useful than mercury porosimetry for determining the proportion of mesopores in the samples.
机译：通过固体反应方法制备含有少量Li_2O和V_2O_5的TiO_2的陶瓷湿度传感器。研究了传感器的孔隙结构与最重要的湿度特性之一，湿度敏感性的关系。通过测量在各种湿度条件下测量传感器的阻抗来研究湿度敏感性，通过汞侵入孔隙瘤测量和通过氮吸附方法测量孔径分布。传感器的滞后性被显示为显着依赖于它们的微观结构，特别是中孔的体积比在传感器元件中的所有孔。发现氮吸附比用于确定样品中的中孔比例的汞孔隙瘤更有用。

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