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Effect of Gel-films-thickness and Sintering Conditions on the Crystal Structure and Microstructure of Alkoxy-derived BaTiO_3 Thin Films

机译:凝胶膜厚度和烧结条件对烷氧基衍生BATIO_3薄膜晶体结构和微观结构的影响

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Various BaTiO_3 thin films were fabricated at 650°C by using different conditions such as the heating rate and alkoxy-derived gel-film thickness. In this study, the spin-coating and calcination step were repeated several times to control the gel-films thickness. And then the one-sintering was carried out with various heating rates. BaTiO_3 films with perovskite phase were obtained by using the heating rate of 100°C/sec and the surface morphology became rough with increase of gel-film thickness. We considered that the change of root mean square (rms) roughness and cross-sectional profiles by various heating rates was caused by densification.
机译:通过使用不同的条件,例如加热速率和烷氧基衍生的凝胶膜厚度,在650℃下制造各种BATIO_3薄膜。在该研究中,重复旋涂和煅烧步骤几次以控制凝胶膜厚度。然后用各种加热速率进行一次烧结。通过使用100℃/秒的加热速率获得具有钙钛矿相的BatiO_3膜,并且表面形态随着凝胶膜厚度的增加而变得粗糙。我们认为通过致密化引起各种加热速率的根均线(RMS)粗糙度和横截面轮廓的变化是由致密化引起的。

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