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首页> 外文会议>Proceedings of the Ninth IEEE Sensors Conference >Comparative study of SAW temperature sensor based on different piezoelectric materials and crystal cuts for passive wireless measurement
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Comparative study of SAW temperature sensor based on different piezoelectric materials and crystal cuts for passive wireless measurement

机译：基于不同压电材料和晶体切割的声表面波温度传感器用于无源无线测量的比较研究

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摘要

As widely reported substrates for surface acoustic wave (SAW) temperature sensors, YX-cut quartz, YZ-cut LiNbO3 and 128°YX-cut LiNbO3 are selected to fabricate different one-port SAW resonator temperature sensors and comprehensive comparative studies of their performance and specifications are conducted carefully in this paper. Firstly, SAW sensors of each cut with 50 different layouts were designed and fabricated according to the calculated SAW velocity, and a general wireless measurement platform was setup. Secondly, under the same test conditions, Q factor, temperature sensitivity and decaying waves of these sensors were tested, and along with the calculated temperature coefficient of frequency (TCF), these parameters were finally compared respectively. After comparison, the conclusions are as follows: LiNbO3 sensors had higher temperature sensitivity, and showed superiority without the limitation of distance in wireless measurements, while quartz sensors performed well when the distance increased, and this suggests they can be applied to long distance sensing for their high Q factor even the sensitivity is moderate.
机译：作为广泛报道的表面声波（SAW）温度传感器基板，选择了YX切割石英，YZ切割LiNbO 3 和128°YX切割LiNbO 3 本文仔细研究了不同的单端口SAW谐振器温度传感器，并对它们的性能和规格进行了全面的比较研究。首先，根据计算出的声表面波速度，设计并制作了具有50个不同布局的每个切口的声表面波传感器，并建立了通​​用的无线测量平台。其次，在相同的测试条件下，对这些传感器的Q因子，温度灵敏度和衰减波进行了测试，最后与计算出的频率温度系数（TCF）分别进行了比较。经过比较，得出以下结论：LiNbO 3 传感器具有更高的温度灵敏度，并且在无线测量中不受距离限制的情况下显示出优越性，而石英传感器在距离增加时表现良好，这表明它们即使灵敏度适中，也可以应用于Q值高的长距离传感。

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