Methods to eliminate pattern collapse in mass production by the resist replacement without changing model-based optical-proximity-correction

机译：在不更改基于模型的光学邻近校正的情况下，通过抗蚀剂替换来消除批量生产中的图案崩溃的方法

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

Pattern collapse issue was successfully eliminated by the addition of hydrophobic and transparent additives into the resist. The additives form 25 nm-thick layer at the top of the new resist. The layer reduces maximum-tensile-stress acting on resist patterns by 22% due to the hidrophobicity. It was also found that the layer hardly affected the optical-proximity-effect (Difference of thorough-pitch CD: −0.8 ∼ 0.6 nm). As a result, the same OPC could be used without further modification in the OPC model.

机译：通过向抗蚀剂中添加疏水和透明添加剂，成功消除了图案塌陷问题。添加剂在新抗蚀剂的顶部形成25 nm厚的层。由于疏水性，该层将作用在抗蚀剂图案上的最大拉伸应力降低了22％。还发现该层几乎不影响光学邻近效应（全间距CD的差：-0.8〜0.6nm）。结果，可以在不对OPC模型进行进一步修改的情况下使用相同的OPC。

著录项

来源
《Eighteenth International Symposium on Semiconductor Manufacturing》|2010年|p.1-3|共3页
会议地点
作者
Matsui Yoshinori; Yuguchi Takayuki; Fujita Masafumi; Yamaguchi Kazuto; Yamazaki Tomoya; Uchiyama Takayuki; Takizawa Masaharu;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类半导体器件制造工艺及设备;
关键词

相似文献

外文文献
中文文献
专利

1. Two polymorphisms in the vitamin D receptor gene--association with bone mass and 5-year change in bone mass with or without hormone-replacement therapy in postmenopausal women: the Danish Osteoporosis Prevention Study. [J] . Tofteng CL, Jensen JE, Abrahamsen B, Journal of bone and mineral research: the official journal of the American Society for Bone and Mineral Research . 2002,第8期

机译：维生素D受体基因的两个多态性-绝经后妇女与骨量的相关性以及有或没有激素替代疗法的骨量5年变化：丹麦骨质疏松症预防研究。
2. Analysis of pattern collapse of ArF excimer laser resist by direct peeling method with atomic force microscope tip [J] . Akira Kawai, Norio Moriike Microelectronic Engineering . 2001,第期

机译：原子力显微镜尖端直接剥离法分析ArF准分子激光抗蚀剂的图案塌陷
3. Fatigue analysis of micro resist pattern analyzer by the direct collapse method with atomic force microscope [J] . Norio Moriike, Akira Kawai 日本接着学会誌 . 2000,第10期

机译：原子力显微镜直接塌陷法微抗蚀剂图案分析仪的疲劳分析
4. Methods to eliminate pattern collapse in mass production by the resist replacement without changing model-based optical-proximity-correction [C] . Matsui Yoshinori, Yuguchi Takayuki, Fujita Masafumi, International Symposium on Semicomductor Manufacturing . 2010

机译：通过抗蚀剂替换在不改变基于模型的光学 - 邻近校正的情况下消除大规模生产模式崩溃的方法
5. Some model-based and distance-based clustering methods for characterization of regional ecological stressor-response patterns and regional environmental quality trends. [D] . Farrar, David B. 2006

机译：一些基于模型和基于距离的聚类方法，用于表征区域生态压力响应模式和区域环境质量趋势。
6. Dynamic water patterns change the stability of the collapsed filter conformation of the KcsA K+ channel [O] . Di Wu -1

机译：动态水模式改变了KcsA K +通道折叠滤镜构象的稳定性
7. HIT Poster session 2P479Strain concordance in a real-world setting: experience in our laboratory after equipment upgradeP4803D echocardiography is a fast-learning and reliable method for the measurements of left atrial volumesP481Echocardiographic parameters associated with long-term appropriate antiarrhythmic therapies in cardiac resynchronization therapy defibrillator patientsP482Noninvasively measured global wasted myocardial work allows for quantitative assessment of typical left ventricular mechanical dyssynchrony pattern in patients with left bundle branch blockP483The impact of adherence to physical exercise on the improvement of cardiovascular remodeling and metabolic status in healthy untrained postmenopausal womenP484The impact of the latest chamber quantification recommendations on the prediction of left atrial appendage thrombus presenceP485The cardiac-enriched miRNAs plasma levels (miR-1, miR-133a, miR-499) reflect the impaired left ventricular systolic function and correlate with cardiac necrosis markers in early phase of NSTE-ACSP486Acute regional myocardial deformation changes in patients with severe aortic stenosis and preserved ejection fraction after isolated aortic valve replacementP487Left ventricular rotational deformation in asymptomatic patients with chronic aortic regurgitation and normal left ventricular ejection fraction P488The appropriate use of transthoracic echocardiography for the exclusion of infective endocarditisP489In patients with hypertrophic cardiomyopathy, left ventricular mass and shape by three-dimensional echocardiography are related with dynamic obstruction and functional capacityP490Mitral leaflet sizing in hypertrophic cardiomyopathy: impact of method and timingP491Echocardiographic predictors of atrial fibrillation in obese womenP492Echocardiographic risk factors for 30 day mortality after the hybrid procedure for hypoplastic left heart syndromeP493Left ventricular mass is an independent predictor of coronary flow reserve: insights from a single centre stress echo cohortP494Transesophageal echocardigoraphy uner conscious sedation for guiding cryoballoon pulmonary vein isolation in paroxysmal atrial fibrillation - the safety and feasibility studyP495Transesophageal echocardigoraphy under conscious sedation for guiding cryoballoon pulmonary vein isolation in paroxysmal atrial fibrillation - the safety and feasibility studyP496Three-dimensional trans-esophageal echocardiography assessment of the immediate morphological changes of the mitral annulus after percutaneous mitral edge-to-edge repairP497Clinical value of global and regional longitudinal strain in prediction of myocardial ischemia in asymptomatic diabetes type 2 patientsP499Comparison of prognostic operative risk impact on the global longitudinal strain right ventricle (GLS RV) and tricuspid annular plane systolic excursion (TAPSE) values in patients with ischemic cardioP498Right heart function in early diastolic dysfunction: 2D speckle-tracking echocardiography-based assessment of right atrial and right ventricular functionP500 Comparison of 2D, 3D transesophageal echocardiography and computed tomography during the assessment of left atrial appendage closure [O] . JF. Cueva Recalde, A. Velcea, S. Aguiar Rosa, 2016

机译：HIT墙报2P479Strain一致性在真实世界场景：在设备upgradeP4803D超声心动图检查后，我们实验室的经验是为测量快速学习和可靠的方法左心房在心脏再同步治疗除颤器patientsP482Noninvasively长期适当的抗心律失常治疗相关volumesP481Echocardiographic参数测量了全球浪费心肌工作允许患者依从性左束支传导blockP483The影响到体育锻炼上的最新室定量建议健康未受训练的绝经后womenP484The影响心血管重构和代谢状态的改善典型左室机械不同步模式的定量评估上的预测左心耳血栓presenceP485The心脏富集miRNA的血浆水平（的miR-1，的miR-133a的，的miR-499）反映受损左心室收缩功能及CORREL吃用的患者的严重主动脉瓣狭窄NSTE-ACSP486Acute区域心肌变形的变化早期心肌坏死标志物和后射血分数分离主动脉瓣膜replacementP487Left心室旋转在无症状患者慢性主动脉瓣反流和正常左心室射血分数P488The适当使用不变形对于感染endocarditisP489In肥厚型心肌病患排除经胸超声心动图，由三维超声心动图左心室质量和形状与动态障碍物和功能capacityP490Mitral相关小叶上浆肥厚型心肌病：的心房纤维性颤动中肥胖womenP492Echocardiographic方法和timingP491Echocardiographic预测结果的影响对于syndromeP493Left左室质量发育不全左心脏杂交程序后的30天死亡率的危险因素是冠状动脉血流RESER的独立预测因子已经：见解从一个单一的中心的应力回波cohortP494Transesophageal echocardigoraphy纳清醒镇静用于引导低温球囊肺静脉阵发性心房颤动隔离 - 下清醒镇静的安全性和可行性studyP495Transesophageal echocardigoraphy为阵发性心房颤动引导低温球囊肺静脉隔离 - 安全性和可行性studyP496Three的经皮二尖瓣边缘到边缘repairP497Clinical全球及区域纵向应变的心肌缺血的预测无症状糖尿病类型值2 patientsP499Comparison对预后手术风险冲击二尖瓣环的直接形态学变化维经食道超声心动图评估全球纵向应变右心室（RV GLS）和三尖瓣环平面收缩漂移（TAPSE）患者的早期舒张功能障碍性脑缺血cardioP498Right心脏功能值：2D斑点的trackin右心室2D的functionP500比较右心房的和g超声心动图基于评估，3D食管超声心动图和计算机断层左心耳闭合的评估过程中
8. Polymeric Self-Assembled Monolayers. 3. Pattern Transfer by Use ofPhotolithography, Electrochemical Methods and an Ultrathin Self-Assembled Diacetylenic Resist [R] . Chan, K. C., Kim, T., Schoer, J. K., 1995

机译：聚合物自组装单层膜。 3.利用光刻，电化学方法和超薄自组装二乙炔抗蚀剂进行图案转移

Methods to eliminate pattern collapse in mass production by the resist replacement without changing model-based optical-proximity-correction

摘要

著录项

相似文献

相关主题

期刊订阅