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首页> 外文会议>International conference on advanced ceramics and composites >PHASE COMPOSITION, THERMAL STABILITY, PHYSICAL AND MECHANICAL PROPERTIES OF SUPERHARD ON BASE Zr-Ti-Si-N NANOCOMPOSITE COATINGS
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PHASE COMPOSITION, THERMAL STABILITY, PHYSICAL AND MECHANICAL PROPERTIES OF SUPERHARD ON BASE Zr-Ti-Si-N NANOCOMPOSITE COATINGS

机译：Zr-Ti-Si-N纳米复合涂层基超硬相的组成，热稳定性，物理和力学性能

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Zr-Ti -Si-N coating had high thermal stability of phase composition and remained structure state under thermal annealing temperatures reached 1180°C in vacuum and 830°C in air. Effect of isochronous annealing on phase composition, structure, and stress state of Zr-Ti-Si-N- ion-plasma deposited coatings (nanocomposite coatings) was reported. Below 1000°C annealing temperature in vacuum, changing of phase composition is determined by appearing of siliconitride crystallites (B-Si_3N_4) with hexagonal crystalline lattice and by formation of ZrO_2oxide crystallites. Formation of the latter did not result in decay of solid solution (ZrTi)N but increased in it a specific content of Ti-component.Vacuum annealing increased sizes of solid solution nanocrystallites from (12 to 15) in as-deposited coatings to 25nm after annealing temperature reached 1180°C. One could also find macro- and microrelaxations, which were accompanied by formation of deformation defects, which values reached 15.5 vol.%.Under 530°C annealing in vacuum or in air, nanocomposite coating hardness increased. When Ti and Si concentration increased and three phases nc-ZrN, (Zr, Ti)N-nc, and a-Si_3N_4 were formed, average hardness increased to 40,8 ± 4GPa. Annealing to 500°C increased hardness and demonstrated lower spread in values H = 48 ± 6GPa and E = (456 ± 78)GPa.
机译：Zr-Ti-Si-N涂层具有高的相组成热稳定性，并且在真空中达​​到1180°C，在空气中达到830°C的热退火温度下仍保持结构状态。报告了等时退火对Zr-Ti-Si-N-离子等离子体沉积涂层（纳米复合涂层）的相组成，结构和应力状态的影响。在真空中低于1000°C的退火温度下，相组成的变化是通过出现具有六方晶格的氮化硅微晶（B-Si_3N_4）和形成ZrO_2氧化物微晶来确定的。后者的形成不会导致固溶体（ZrTi）N的分解，但是会增加Ti组分的特定含量。 在退火温度达到1180°C之后，真空退火将固溶纳米晶体的尺寸从沉积状态的涂层中的（12至15）增加到25nm。人们还可以发现宏观和微观松弛，并伴有变形缺陷的形成，变形缺陷的含量达到15.5％（体积）。 在真空或空气中在530°C退火下，纳米复合涂层的硬度增加。当Ti和Si浓度增加并形成了nc-ZrN，（Zr，Ti）N-nc和a-Si_3N_4三相时，平均硬度增加至40,8±4GPa。退火至500°C可以提高硬度，并且在H = 48±6GPa和E =（456±78）GPa时显示出较低的扩展。

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