4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips

机译：4.8 MHz AFM纳米探针，带电容换能器和批量制造的纳米尖端

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We report here on high resonance frequency AFM probes based on MEMS bulk mode resonators. They consist on silicon ring resonators with capacitive transducers vibrating in the in-plane elliptic mode. Nano-tips placed at the maximum of vibration are fabricated in batch process. After electrical and optical characterizations, chips supporting the resonator and the prominent tip are extracted from the wafer. Next, the AFM nanoprobes are integrated in a commercially available AFM set-up with a modified probe holder. Experimental results of high resonance frequency AFM images are presented.

机译：我们在这里报告基于MEMS体模谐振器的高谐振频率AFM探头。它们由带有电容式换能器的硅环谐振器组成，电容式换能器以面内椭圆模式振动。处于最大振动状态的纳米尖端是分批制造的。经过电学和光学表征后，从晶片中提取出支撑谐振器和突出尖端的芯片。接下来，将AFM纳米探针集成在具有改良探头支架的市售AFM装置中。提出了高共振频率原子力显微镜图像的实验结果。

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《2011 IEEE 24th International Conference on Micro Electro Mechanical Systems》|2011年|p.517-520|共4页
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Walter B.; Faucher M.; Mairiaux E.; Xiong Z.; Buchaillot L.; Legrand B.;
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1. MICROMACHINED AFM TRANSDUCER WITH DIFFERENTIAL CAPACITIVE READ-OUT [J] . Bay J., Laegsgaard E., Hansen O., Journal of Micromechanics and Microengineering . 1995,第2期

机译：差分电容读出的微机械AFM传感器
2. MICROMACHINED AFM TRANSDUCER WITH DIFFERENTIAL CAPACITIVE READ-OUT [J] . Bay J., Laegsgaard E., Hansen O., Journal of Micromechanics and Microengineering . 1995,第2期

机译：差分电容读出的微机械AFM传感器
3. A comparison between conventional and collapse-mode capacitive micromachined ultrasonic transducers in 10-MHz 1-D arrays [J] . Park K.K., Oralkan O., Khuri-Yakub B.T. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control . 2013,第6期

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4. 4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips [C] . Walter B., Faucher M., Mairiaux E., International Conference on Micro Electro Mechanical Systems . 2011

机译：4.8 MHz AFM纳米抄本，具有电容式传感器和批量制造的纳米
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7. Temperature changes caused by the difference in the distance between the ultrasound transducer and bone during 1 MHz and 3 MHz continuous ultrasound: a phantom study [O] . Akihiko Ohwatashi, Satoshi Ikeda, Katsuhiro Harada, 2015

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8. Non-Contacting Capacitive Wave Transducers. Part II. Design and Development of a Capacitive Wave Transducer, [R] . zwarts, c. m. g. 1975

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4.8 MHz AFM nanoprobes with capacitive transducers and batch-fabricated nanotips

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