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首页> 外文会议>2011 IEEE 24th International Conference on Micro Electro Mechanical Systems >A novel accelerometer based on contact resistance of integrated carbon nanotubes
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A novel accelerometer based on contact resistance of integrated carbon nanotubes

机译：基于集成碳纳米管接触电阻的新型加速度计

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A novel accelerometer based on electrical contact resistance change between two sets of carbon nanotubes (CNTs) is presented. After the micro structures are fabricated by silicon bulk micromachining, the CNTs are synthesized from each of the facing surfaces of proof-mass and fixed electrode. When the motion of the proof-mass is generated from incoming acceleration, effective contact area between two sets of CNT bundles changes, resulting in a change of electrical contact resistance. This CNTs-based accelerometer achieves both high sensitivity and wide bandwidth. Two different sensing modes are experimentally verified and compared: the approach mode where the incoming acceleration pushes the proof-mass to the fixed electrode and the separation mode where the acceleration pulls away the proof-mass from the fixed electrode. In each case, the sensitivities are 7.62 mV/g/V and 17.23 mV/g/V, respectively. It is confirmed that the contact resistance remained nearly constant after 14.4 million cycles of operation under 400 Hz sinusoidal acceleration with the magnitude of -10 g ~ +10 g.
机译：提出了一种基于两组碳纳米管（CNT）之间电接触电阻变化的新型加速度计。在通过硅体微机械加工制造微结构之后，从质量块和固定电极的每个相对表面合成CNT。当质量加速度的运动由传入的加速度产生时，两组CNT束之间的有效接触面积发生变化，从而导致电接触电阻发生变化。这种基于CNT的加速度计可实现高灵敏度和宽带宽。实验验证并比较了两种不同的感应模式：进入模式，进入的加速度将检测质量推向固定电极，分离模式，其中加速度将检测质量从固定电极拉开。在每种情况下，灵敏度分别为7.62 mV / g / V和17.23 mV / g / V。可以确定的是，在400 Hz正弦加速度下，在-10 g〜+10 g的幅度下，经过1440万次操作后，接触电阻几乎保持恒定。

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