This paper describes the corrosion resistance consolidation of a diaphragm type vacuum sensor using a high corrosion resistance material. Initially, we had fabricated a vacuum sensor using a Ru based thin film amorphous alloy, whose high corrosion resistance was confirmed in wet tests. In the high corrosion gas tests, however, the sensor resists NF3 and COF2 gases but does not resist ClF3 gas. Therefore, we searched for new Ni based amorphous alloys which can also resist ClF3 using a combinatorial search based on a MEMS process. We were able to fabricate new sensors using Ni56Nb33Ti11 and Ni49Nb35Ti16 amorphous alloys which were shown to resist all three mentioned gases.
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机译：本文介绍了使用高耐腐蚀材料的膜片式真空传感器的耐腐蚀固结性。最初，我们使用Ru基薄膜非晶态合金制造了真空传感器，该合金的高耐腐蚀性在湿法测试中得到了证实。但是，在高腐蚀气体测试中，传感器可以抵抗NF 3 和COF 2 气体，但不能抵抗ClF 3 气体。因此，我们使用基于MEMS工艺的组合搜索来搜索新型的Ni基非晶合金，该合金也可以抵抗ClF 3 。我们能够使用Ni 56 Nb 33 Ti 11 和Ni 49 Nb 35来制造新的传感器 Ti 16 非晶合金，显示出可以抵抗所有提到的三种气体。
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