This study designs and fabricates a suspending antenna on silicon substrate with backside electromagnetic band-gap (EBG) structures using surface and bulk micromachining techniques. The proposed Si-based antenna with dimension 7 mm × 18 mm × 0.5 mm only and is constructed of a ground copper plane, supporting copper vias, a suspending F-shape copper conducting layer and backside silicon cavities (to form the EBG structure). The implemented Si-based antenna demonstrates very low return loss (-35.5 dB, at 4.85 GHz) and very wide bandwidth (43%, 3.75~5.8 GHz).
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