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Optimization and Deposition of Wide-Angle Broadband Antireflective Coatings

机译:广角宽带增透膜的优化与沉积

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A new method was proposed for the design of graded-refractive-index (GRIN) antireflective (AR) coatings with wide-angle and broadband characteristics. The gradient-index profiles of AR coatings were optimized using a genetic algorithm at a certain physical thickness. By applying optimized AR coating onto BK7 glass, the reflectance could be reduced to about 0.1 % for wavelength range covering 400 nm to 800 nm and incident angle from 0 to 80 degree. The optimization of step-graded GRIN AR coating was further investigated in detail, with a minimum refractive index of 1.1 which was able to be realized in our coating system. The average residual reflection reduced drastically with the increase of layer number. Sculptured AR coatings were deposited by electron beam evaporation with glancing angle deposition technology. Residual reflectances of the coating samples were in good agreement with theoretical calculations. Progresses on index optimization and deposition process would promote applications of structure engineered AR coatings, to meet both wide-angle and broadband requirements.
机译:提出了一种设计具有广角和宽带特性的渐变折射率(GRIN)抗反射(AR)涂层的新方法。使用遗传算法在一定的物理厚度下优化了增透膜的梯度折射率分布。通过在BK7玻璃上涂覆优化的增透膜,对于波长范围为400 nm至800 nm和入射角为0至80度的反射率可以降低到约0.1%。我们进一步详细研究了渐变GRIN AR涂层的优化,其最低折射率为1.1,这在我们的涂层系统中是可以实现的。随着层数的增加,平均残留反射率急剧下降。通过掠射角沉积技术通过电子束蒸发沉积雕刻的增透膜。涂层样品的残留反射率与理论计算值非常吻合。折射率优化和沉积工艺的进展将促进结构工程增透膜的应用,以满足广角和宽带需求。

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