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首页> 外文会议>Society of Vacuum Coaters annual technical conference >Hollow Cathode Plasma Activation in Reactive Gas Atmosphere
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Hollow Cathode Plasma Activation in Reactive Gas Atmosphere

机译：活性气体气氛中的空心阴极等离子体活化

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Anew magnetically enhanced hollow-cathode based plasma source was developed in order to generate a large volume homogeneous plasma for substrate pretreatment and plasma-activated deposition processes. The hollow cathode plasma is characterized by various diagnostic techniques. Spatially resolved Langmuir probe and optical emission spectroscopy measurements reveal plasma densities of more than 10~(12)cm~(-3) and 10~(11)cm~(-3) at distances of 30 cm and 125 cm from the plasma source, respectively, and electron temperatures between 6 eV and 1 eV in pure argon atmosphere at pressures between 0.1 and 3.4 Pa. When operated in nitrogen, energy-dispersive mass spectrometry demonstrates that efficient ionization and dissociation of the molecules takes place. Stronger magnetic fields and lowered gas flows through the cathode tube result in enhanced ionization and dissociation rates and higher ion energies. The effect ofhollow-cathode activation on reactively sputter deposited wear resistant ZrNbN coatings is shown, demonstrating significantly improved hardness and surface morphology.
机译：为了产生用于衬底预处理和等离子体活化沉积工艺的大体积均匀等离子体，开发了一种新的基于磁增强的中空阴极的等离子体源。空心阴极等离子体的特征在于各种诊断技术。空间分辨的Langmuir探针和光发射光谱法测量显示，距等离子体源30 cm和125 cm处的等离子体密度分别超过10〜（12）cm〜（-3）和10〜（11）cm〜（-3）在纯氩气氛中，电子温度分别在0.1和3.4 Pa之间，电子温度在6 eV和1 eV之间。当在氮气中操作时，能量分散质谱表明分子发生了有效的电离和离解。较强的磁场和较低的气体流经阴极管会导致离子化和解离速率提高，离子能量更高。显示了空心阴极活化对反应溅射沉积的耐磨ZrNbN涂层的影响，表明硬度和表面形态得到了显着改善。

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