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Deposition of Functional Plasma Polymers by Control of Film Growth Conditions

机译:通过控制膜生长条件沉积功能性等离子聚合物

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The formation of plasma polymers is based on multistep reactions that are taking place both in the gas phase and on the surface. In order to gain more insights, a concept was developed based on the energy input both into the gas phase (plasma) and during film growth (surface) that helps to distinguish between predominating gas phase or surface processes. Deposition rate, mean ion energy and ion flux incident on the substrate surface were examined yielding the energy density dissipated during film growth. Hydrophilic functional plasma polymers were investigated which are based on plasma-chemical processes under moderate ion bombardment. Thus, this process might also be suitable for atmospheric pressure plasmas. A comparison (performance, costs), however, gives good reasons for low pressure plasma processes.
机译:等离子体聚合物的形成基于在气相和表面上均发生的多步反应。为了获得更多的见识,基于在气相(等离子)和薄膜生长(表面)过程中输入的能量,提出了一个概念,该概念有助于区分主要的气相或表面过程。检查沉积速率,平均离子能量和入射在基材表面的离子通量,得出在薄膜生长过程中耗散的能量密度。研究了亲水性功能性等离子聚合物,该聚合物基于中等离子轰击下的等离子化学过程。因此,该过程也可能适用于大气压等离子体。但是,比较(性能,成本)为低压等离子体工艺提供了充分的理由。

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