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Design of a Servo Controlled Rotating Substrate Drum Containing Deposition Height Adjustment

机译:具有沉积高度调节功能的伺服控制旋转底鼓设计

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The past decades have resulted in a number of new insights on effective morphology controlled by variations in the static and dynamic substrate positioning. We have undergone an effort to design and fabricate a multifunctional electron beam deposition system with capabilities including glancing angle, rocking, and rotating drum deposition. Of the specific challenges, the ability to design a servo controlled horizontally rotating drum that also exhibits the ability to adjust the deposition height in the vertical direction presented an acute mechanical design challenge. We present our perspective on the mechanical design and initial implementation of this drive system along with the general chamber design.
机译:过去的几十年中,人们对有效形态学有了许多新见解,这些形态受静态和动态基板位置的变化控制。我们已经努力设计和制造一种多功能电子束沉积系统,其功能包括掠射角,摇摆和旋转鼓沉积。在特定挑战中,设计伺服控制的水平旋转滚筒的能力以及在垂直方向上调整沉积高度的能力提出了严峻的机械设计挑战。我们将介绍有关该驱动系统的机械设计和初始实施以及一般腔室设计的观点。

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