Optical thin films oftentimes suffer from their poor power handling capability, if further developments of optical systems especially for applications in the deep UV spectral region are requested. Especially, the lifetime of functional coatings on laser and conversions crystals and resonator mirrors are a limiting factor following from laser-induced degradation. During recent years, tremendous process innovations can be recognized in ion beam sputtering technology enabling the efficient production of graded-index profiles with oxide materials. This process variant is accompanied with advanced process monitoring equipment measuring the thickness of the growing mixture layer. The manufacturing possibilities evolving from this innovative combination are demonstrated by reviewing recent results for coatings used for high power cw- and pulsed laser systems.
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