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Harmonic Suppression of High-Frequency Power Supply for ICP Light Based on Frequency Power Modulation

机译:基于调频功率调制的ICP光高频电源谐波抑制

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Newly-emerging inductively coupled plasma (ICP) light has high efficiency, long life-time and other comprehensive advantages. But, it's high-frequency power supply will produce conducted electromagnetic interference (EMI) that is hardly suppressed. The paper establishes the conducted EMI model of 150W ICP light's high-frequency power supply, and analyses conducted EMI's production mechanism at the fixed working frequency. Design the modified frequency power modulation algorithm with same frequency change step δ and energy pulse duration gradual change. The conducted EMI and optical power parameters tests indicate that modified frequency modulation can solve the conducted EMI problem well. And it can improve the ICP light's luminous efficiency.
机译:新兴的电感耦合等离子体(ICP)光具有效率高,使用寿命长等综合优势。但是,它的高频电源会产生难以抑制的传导电磁干扰(EMI)。建立了150W ICP灯高频电源的传导EMI模型,并分析了固定工作频率下传导EMI的产生机理。设计具有相同频率变化步长δ和能量脉冲持续时间逐渐变化的改进的频率功率调制算法。传导EMI和光功率参数测试表明,改进的频率调制可以很好地解决传导EMI问题。并且可以提高ICP灯的发光效率。

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