首页> 外文会议>Annual meeting of the American Society for Precision Engineering >TRINANO N100 3D MEASUREMENTS WITH NANOMETER REPEATABILITY AND EFFECTS OF PROBE-SURFACE INTERACTION
【24h】

TRINANO N100 3D MEASUREMENTS WITH NANOMETER REPEATABILITY AND EFFECTS OF PROBE-SURFACE INTERACTION

机译:具有纳米重复性的TRINANO N100 3D测量和探针-表面相互作用的影响

获取原文

摘要

A novel CMM has been developed and manufactured. Its design allows nanometer uncertainty, while greatly reducing manufacturing costs.Initial verification measurements show a standard deviation in single point repeatability of 2.4 nm. The standard deviation in the distance measurement between 2 gauge blocks is measured to be 4.1 nm.
机译:已经开发和制造了一种新型的三坐标测量机。其设计允许纳米不确定性,同时大大降低了制造成本。初步验证测量表明,单点重复性的标准偏差为2.4 nm。 2个量块之间的距离测量的标准偏差为4.1 nm。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号