This paper introduced the dual driving mode control utilizing the wide driving mode for precision positioning in the wide working range and the fine driving mode for ultra-precision position adjustment near the reference position with the continuous holding force. This driving mode utlizes the relationship between the applied voltage signal and the friction force of the electrostatic actuator supported by only lubricating oil. The designed control system demonstrated the high ability to adjust position ultra-precisely with the continuous holding force. The positioning error is smaller than 14nm. The dual driving mode control is also useful for vertical stages.
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